There's more to that than just ASML, as that company in turn uses specialty lenses produced by Zeiss. Additionally there's crucial American IP (I don't recall what specifically) that goes into those machines, so advanced semiconductor production is more of a global effort really.
Meanwhile China is trying to do all that domestically. They might even pull this off, but just like with their 7nm tech, they're unlikely to be able to do this economically.
They're working hard but this particular product is so high-tech they struggle to develop it. I bet they have mostly complete reproductions, but just missing key components like the laser.
